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New Approaches to Image Processing based Failure Analysis of Nano-Scale ULSI Devices energy efficiency but also partly constituting

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New Approaches to Image Processing based Failure Analysis of Nano-Scale ULSI Devices energy efficiency but also partly constitutingNew Approaches to Image Processing Based Failure Analysis of Nano Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods cant keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of

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